The anodic aluminum oxide (AAO) is used as the solid mask,due to the strong bonding of Al2O3,it shows superior mechanica......

采用AZ1500光刻胶作为掩模对GaAs和InP进行ICP刻蚀, 研究了刻蚀参数对光刻胶掩模及刻蚀图形侧壁的影响。结果表明, 光刻胶的碳化变......