Cz-silicon相关论文
硅中的氧化诱生层错(OsF)是一种重要的工艺诱生缺陷,会对微电子器件产生重大影响,为提高硅片质量.要求对OSF有充分了解.综述了氧化......
Dimers as Fast Diffusing Species for the Aggregation of Oxygen in Boron-Doped Czochralski Silicon: F
The thermal behaviors of oxygen-related complexes in boron doped Czochralski Silicon (Cz-Si) wafers at 450°C and 80......
