ECR-MPECVD相关论文
Preparation and Characterization of DLC Films by Twinned ECR Microwave Plasma Enhanced CVD for Micro
Diamond-like carbon (DLC) films have recently been pursued as the protection of MEMS against their friction and wear.Pla......
Preparation and Characterization of DLC Films by Twinned ECR Microwave Plasma Enhanced CVD for Micro
Diamond-like carbon (DLC) films have recently been pursued as the protection of MEMS against their friction and wear.Pla......
Preparation and Characterization of DLC Films by Twinned ECR Microwave Plasma Enhanced CVD for Micro
Diamond-like carbon (DLC) films have recently been pursued as the protection of MEMS against their friction and wear.Pla......
