magnetronreactivesputtering相关论文
Reactive sputtered boron-doped zinc oxide (BZO) film was deposited from argon,hydrogen and boron gas mixture.The reactiv......
以铜和镍铬合金为靶材,用磁迭反应溅射法制备具有干涉效应的Ni-Cr选择性吸收薄膜,用AES,TEM研究薄膜的结构和组成。结果表明,薄膜由10nm大小的颗粒组成......