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  5. Time- and Space-Resolved Characteristics of Ozone Concentration in Atmospheric Pressure Plasma using

Time- and Space-Resolved Characteristics of Ozone Concentration in Atmospheric Pressure Plasma using

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：bmw335
【摘 要】
：
Atmospheric pressure plasmas have been given much attention because of its cost performance and various possibilities for industrial applications.In general,atmospheric plasmas are maintained by the s
【作 者】
：
T. Murase A. Kamata T. Ishijima H. Kawauchi K. Yoshida H. Toyoda 
【机 构】
：
Department of Electrical Engineering and Computer Science, Nagoya University, Japan
【出 处】
：
2011年第三届微电子及等离子体技术国际会议
【发表日期】
：
2011年9期
【关键词】
：
Atmospheric Pressure Plasma Ultra Short Pulse Ozone Spatial Profile 
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Atmospheric pressure plasmas have been given much attention because of its cost performance and various possibilities for industrial applications.In general,atmospheric plasmas are maintained by the short pulse DC or RF high voltages to suppress arc discharges.
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