Using allylamine as a monomer, amine-containing functional films polymerized in RF-plasma were prepared.The surface components, morphology, stability of films and polarity were characterized by Fourier-transform infrared spectroscopy (FTIR), X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM) and surface plasmon resonance (SPR) as well as water contact angle (WCA).The influence of discharge parameters, such as plasma power, discharge modes, exposure times on density of amine group and cross-linking were investigated in detail.As a promise application area in biological materials the biocompatibility of the plasma polymerized film was performed with several cells.The mechanism of amine functional group promoting cell adsorption and proliferation are also explored in this work.