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用燃焰法进行了金刚石厚膜的沉积实验,制备了厚度约0.6mm的金刚石厚膜.用扫描电镜观察了金刚石厚膜的生长过程,研究了生长工艺.
The diamond thick film deposition experiment was carried out by burning flame method, and a thick diamond film with a thickness of about 0.6 mm was prepared. The growth process of diamond thick film was observed by SEM, and the growth process was studied.