The kinetics of internal oxidation of Cu-Al alloy cylinders, containing up to 2.214mol% Al, were investigated in the temperature range of 1023 K to 1273 K, and the depth of internal oxidation was measured in the microscopy. A kinetic equation was derived to describe the internal oxidation of Cu-Al alloy cylinders. For the internal oxidation of Cu-Al alloys employed in the synthesis of alumina dispersion strengthened copper, the kinetic equation can be simplified. The derived equation was checked experimentally by means of oxidation depth measurements and the results show that the derived equation is exact enough to describe the kinetics of internal oxidation of Cu-Al alloy cylinders. Based on this equation and the oxidation depth measurements, the permeability of oxygen in solid copper was obtained. Investigation also shows that there is no evidence for preferential diffusion along grain boundaries in the process of internal oxidation. The kinetics of internal oxidation of Cu-Al alloy cylinders, containing up to 2.214 mol% Al, were investigated in the temperature range of 1023 K to 1273 K, and the depth of internal oxidation was measured in the microscopy. A kinetic equation was derived To describe the internal oxidation of Cu-Al alloy cylinders. For the internal oxidation of Cu-Al alloys employed in the synthesis of alumina dispersion strengthened copper, the kinetic equation can be simplified. The derived equation was checked experimentally by means of oxidation depth measurements and the results show that the derived equation is exact enough to describe the kinetics of internal oxidation of Cu-Al alloy cylinders. Based on this equation and the oxidation depth measurements, the permeability of oxygen in solid copper was. Investigation also shows that there is no evidence for preferential diffusion along grain boundaries in the process of internal oxidation.