关于MEMS结构疲劳特性的研究报道中,典型的研究疲劳的方法是基于观测裂纹的产生和扩展的,如一种扇型梳壮驱动器用来产生循环的拉压作用,以此可以观察Si梁结构的裂纹的扩展情况.该方法采用渐变参量的方法来描述疲劳现象,如参量平均杨氏模量E,而且提出了一种利用检测电容来达到疲劳特性描述的测试结构.该电容和由于作用力让梁产生的位移之间有关.通过检测到的电容值,计算平均杨氏模量E以此来反映这种简单的MEMS结构的疲劳特性,最后,这种方法通过ANSYS进行验证. In the research reports about the fatigue characteristics of MEMS structures, the typical method for studying fatigue is based on the observation and propagation of crack growth. For example, a fan-shaped comb-shaped actuator is used to generate cyclic tension and compression action, so as to observe the structure of Si beam This method uses a gradual parameter approach to describe fatigue phenomena such as parametric average Young’s modulus E and proposes a test structure that uses a sensing capacitor to characterize the fatigue characteristics of the capacitor Based on the detected capacitance, the average Young’s modulus E is calculated to reflect the fatigue behavior of this simple MEMS structure. Finally, this method is validated by ANSYS.