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如果在洁净室内能直接观察微粒,那么不但对分析微粒的特性、气流和高效空气过滤器针孔等很有用,而且还可避免由于用普通的光散射微粒计数器而带来的采样头干扰测试场、采样管内微粒的吸附和散发、无法进行等速采样和采样风量小等缺点。用一个光学系统、录象系统和图象处理系统就能对微粒进行遥查。一、微粒遥查的图象处理系统图象处理系统由光源、光电探查器和图象处理器三部分组成(见图1)。利用带镜子的氦-氖激光的方向性和单色性减少光能
If the particles are directly observed in the clean room, it is not only useful for analyzing the characteristics of the particles, airflow, and high efficiency air filter pinholes, but also avoiding the sampling head interference test field due to the use of an ordinary light scattering particle counter. The adsorption and distribution of particles in the sampling tube, the inability to perform constant velocity sampling, and the small sample volume are disadvantages. With an optical system, a video recording system and an image processing system, the particles can be remotely searched. I. Image processing system for particle remote inspection The image processing system consists of three parts: light source, photodetector and image processor (see Figure 1). Reduce the light energy by using the directional and monochromaticity of the holmium-neon laser with mirror