低气压下的等离子体属低温等离子体，其特征是电子温度比原子（分子）温度高得多。由于等离子体中各种粒子间以及它们与固体表面间发生的各种物理、化学过程，从而产生等离子体刻蚀、沉积、改质与催化． Low-pressure plasma is a low-temperature plasma, which is characterized by electron temperature is much higher than the temperature of atoms (molecules). Plasma etching, deposition, modification, and catalysis occur due to various physical and chemical processes occurring between various particles in the plasma and between them and the solid surface.