用化学浴沉积法制备了CdS薄膜 ,并研究了加超声波对CdS薄膜生长过程的影响。利用卢瑟福背散射 ,X 射线粉末衍射和扫描电子显微镜对薄膜的厚度、晶相和表面形貌进行了表征。结果表明施加超声波的作用能有效地改善薄膜的质量 ,制备出均匀、致密的有较好的晶体结构CdS薄膜。同时 ,通过时间的控制可以精确地控制薄膜在 5 0nm左右 ,以满足制备太阳能电池的特殊要求。 CdS thin films were prepared by chemical bath deposition and the effects of ultrasonic on the growth of CdS thin films were also studied. The film thickness, crystal phase and surface morphology were characterized by Rutherford backscattering, X-ray powder diffraction and scanning electron microscopy. The results show that the application of ultrasound can effectively improve the film quality and prepare a uniform, dense and better crystalline CdS film. At the same time, through the control of the time can accurately control the film in about 50nm, in order to meet the special requirements of the preparation of solar cells.