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介绍了应用12MeV电子辐照效应将P ̄+nn ̄+普通整流二极管改制成高频整流二极管的新技术。多年研究、制造结果表明,该方法与传统掺金工艺相比,少子寿命控制精确,t_(rr)、V_F一致性、重复性好,高温性能明显改善,合格率提高30%以上,工艺简而易行,经济效益显著。
Introduced the application of 12MeV electron irradiation effect P ~ + nn ~ + ordinary rectifier diode into a new high-frequency rectifier diode technology. Years of research and manufacturing results show that the method has the advantages of accurate life control, t rr, V_F consistency, good repeatability and significantly improved high-temperature performance compared with the conventional gold-doping process, with a passing rate of over 30% and a simple process Easy to operate, significant economic benefits.