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一、引言自动旋转检偏器椭偏谱仪是一种研究薄膜及表面的光学仪器,用于测量不同波长下,样品的折射率n、消光系数k、介电常数e_1和e_2、膜厚d 等光学参数,在物理、化学、电子、生物医学等研究中是一种十分有效的工具。1962年Budde 设计了旋转检偏器椭偏仪以后,这项技术在椭偏光测量领域获得了很大发展。1975年,Aspaes 等人报道了他们的、计算机化的高精度扫描椭偏仪,该仪器工作波长范围是2250～7200(?),ψ的精密度±0.0005°,△的精密度±0.001°。1982年,江任荣等也报道了他们建立的手动式椭圆偏振光谱仪。本文介绍我们研制的、自动旋转检偏器椭偏谱仪(简称SRAE )的结构、测量原理及应用。二、结构和工作原理SRAE 的结构如图1所示。有两种工作方式。处在工作方式Ⅰ时,检偏器和光电倍增管(简称PMT)与起偏器在同一直线上,适应于系统调试或透射式椭偏测量。SRAE 一般工作在方式Ⅱ状态,布局和定位如图1。测量时,起偏器的起偏角P 为30°,光对样品的入射角φ为70°。
I. INTRODUCTION Automatic Rotating Analyzer The ellipsometer is an optical instrument for studying thin films and surfaces. It is used to measure the refractive index n, extinction coefficient k, dielectric constant e_1 and e_2, d And other optical parameters, in physics, chemistry, electronics, biomedical research is a very effective tool. After Budde designed the rotational analyzer ellipsometer in 1962, this technology has gained momentum in the field of spectroscopic ellipsometry. In 1975, Aspaes et al. Reported on their computerized high-precision scanning ellipsometer, which operates in the wavelength range of 2250 to 7200 (?), With a precision of ± 0.0005 ° for ψ and a precision of ± 0.001 ° for Δ. In 1982, Jiang Renrong also reported that they established a manual spectroscopic ellipsometer. This article introduces the structure, measurement principle and application of the automatic rotation analyzer ellipsometer (SRAE) developed by us. Second, the structure and working principle SRAE structure shown in Figure 1. There are two ways to work. In working mode Ⅰ, the analyzer and photomultiplier tube (PMT) and the polarizer are on the same line, which are suitable for system debugging or transmission ellipsometry. SRAE generally work in mode Ⅱ state, layout and positioning as shown in Figure 1. For the measurement, the polarizer has an off-angle P of 30 ° and a light incident angle φ of 70 ° on the sample.