Effects of Annealing Temperature on the Properties of Copper Films Prepared by Magnetron Sputtering

来源 :Journal of Wuhan University of Technology(Materials Science | 被引量 : 0次 | 上传用户:yyn_8305112002
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Copper oxide thin films were prepared by a direct-current magnetron sputtering method followed by a thermal annealing treatment at 100-500 °C. The obtained films were characterized by X-ray diffraction, UV–vis absorption spectroscopy, scanning electron microscopy, Raman spectroscopy, and X-ray photoelectron spectroscopy. With the increase of the annealing temperature, it was found that the films transformed sequentially from amorphous to single-phase Cu(100 ℃), mixed-phase of Cu and Cu2O(150 ℃), single-phase Cu2O(200 ℃), then to mixed-phase of Cu2 O and Cu O(300 ℃), and finally to single-phase Cu O(400- 500 ℃). Further analyses indicated that the Cu/Cu2 O thin films and the Cu2 O thin films presented no further oxidation even on the surface in air atmosphere. Additionally, the visible-light photocatalytic behavior of the copper oxide thin films on the degradation of methylene blue(MB) was also investigated, indicating that the films with pure Cu2 O phase or Cu/Cu2 O mixed phases have excellent photocatalytic efficiencies. Copper oxide thin films were prepared by a direct-current magnetron sputtering method followed by a thermal annealing treatment at 100-500 ° C. The resulting films were characterized by X-ray diffraction, UV-vis absorption spectroscopy, scanning electron microscopy, Raman spectroscopy , and the X-ray photoelectron spectroscopy. With the increase of the annealing temperature, it was found that the films were transformed sequentially from amorphous to single-phase Cu (100 ° C), mixed-phase of Cu and Cu2O phase Cu2O (200 ° C), then to mixed-phase of Cu2 O and Cu O (300 ° C), and finally to single-phase Cu O (400-500 ° C). the Cu2 O thin films presented no further oxidation even on the surface in air atmosphere. Additionally, the visible-light photocatalytic behavior of the copper oxide thin films on the degradation of methylene blue (MB) was also investigated, indicating that the films with pure Cu2 O phase or Cu / Cu2 O mixed Phases have excellent photocatalytic efficiencies.
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