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给出了利用红外透射光谱计算金刚石薄膜中SP2/SP3键价比,从而判断金刚石薄膜质量的判断技术。这种方法给出了薄膜质量的定量判断,甚至当由于灵敏度限制拉曼光谱无法给出判断结果时这种方法仍可使用。文中给出了两个金刚石薄膜样品的计算结果并和非晶碳膜进行了比较。
The judgment technique of determining the diamond film quality by using the infrared transmission spectrum to calculate the cost ratio of SP2 / SP3 in the diamond film is given. This method gives a quantitative judgment of the quality of the film and can be used even when the judgment result can not be given due to the sensitivity-limited Raman spectroscopy. The calculation results of two diamond thin films are given and compared with amorphous carbon films.