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为了验证离子束修正超高陡度镜面的能力,对采用五轴离子束加工超高陡度镜面的问题进行了分析研究和加工实验。根据现有检测条件制定了实验方案并对面形数据进行了处理;对超过机床五轴加工摆轴行程区域的驻留时间进行了补偿;建立了离子束五轴加工后置处理算法,根据该算法编制了数控程序生成软件,并通过实验验证了生成的数控程序的正确性;最后进行了超高陡度镜面的五轴离轴加工实验,经过5轮迭代加工后,元件面形由初始的峰谷(PV)值为57.983 nm、均方根(RMS)值为9.406 nm,收敛PV值为11.616 nm、RMS值为1.306 nm,总收敛比达到7.20。实验结果表明:采用五轴离子束加工超高陡度镜面的方案可行,并且获得了较高的收敛效率和加工精度,同时验证了离子束离轴镜加工的可行性。
In order to verify the ability of ion beam to correct ultra-high steep mirror, the problem of using ultra-high and steep mirror with five-axis ion beam processing is analyzed and processed experimentally. According to the existing test conditions, the experimental plan was made and the surface shape data was processed. The dwell time that exceeded the travel axis of the five-axis machining axis of the machine tool was compensated. The post-processing algorithm of the five-axis ion beam machining was established. The numerical control program generation software was prepared and the correctness of the generated NC program was verified through experiments. Finally, a five-axis off-axis machining experiment of ultra-high steepness mirror was performed. After five iterations of machining, The PV value was 57.983 nm, the root mean square (RMS) value was 9.406 nm, the convergent PV value was 11.616 nm, the RMS value was 1.306 nm and the total convergence ratio was 7.20. The experimental results show that it is feasible to use 5-axis ion beam to process ultrahigh steep mirror, and high convergence efficiency and processing accuracy are obtained. The feasibility of off-axis ion beam machining is verified.