Integrated circuits (IC) used in space environment suffer from worse single event effects (SEE) with technology scaling.The experimental testing is thus of primary importance to guarantee the reliability of microelectronic devices used for space-based systems. For heavy ion irradiation at accelerator facilities, angled ion strikes (see Fig. 1) are commonly used to increase linear energy transfer (LET) of incident ions by inverse-cosine law, i.e. LETeff=LET/cos(θ), Integrated circuits (IC) used in space environment suffer from worse single event effects (SEE) with technology scaling. The experimental testing is thus primary importance to guarantee the reliability of microelectronic devices used for space-based systems. For heavy ion irradiation at accelerator facilities, angled ion strikes (see Fig. 1) are commonly used to increase linear energy transfer (LET) of incident ions by inverse-cosine law, ie LETeff = LET / cos