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石英音叉作为力传感器广泛地应用于各种扫描探针显微镜,主要涉及石英音叉的同相振动和反相振动两种振动模式.通过实验方法和有限元仿真方法对石英音叉的两种振动模式进行研究,发现石英音叉的双臂之间以及双臂与音叉的基部之间都存在耦合作用,双臂之间的耦合使音叉的反相共振频率升高,双臂与基部之间的耦合使音叉的同相共振频率降低.针对两种振动模式的动态特性建立了石英音叉的机械模型并进行合理简化.简化模型是一个四弹簧三质点系统,计算了简化模型的参数.通过一个音叉臂等效质量变化与音叉反相共振频率变化之间的定量关系证明了简化机械模型能够准确地反映石英音叉应用在扫描探针显微镜中的机械特性.
Quartz tuning fork as a force sensor is widely used in various scanning probe microscopes, which mainly relate to two kinds of vibration modes of in-phase vibration and anti-phase vibration of quartz tuning fork. Two vibration modes of quartz tuning fork are studied by experimental method and finite element simulation It is found that there is coupling between the arms of the quartz tuning fork and between the two arms and the base of the tuning fork. The coupling between the arms increases the resonant frequency of the anti-phase of the tuning fork. The coupling between the arms and the base makes the tuning fork The resonance frequency of the same phase is reduced.The mechanical model of the quartz tuning fork is established and simplified for the dynamic characteristics of the two vibration modes.The simplified model is a four-spring three-mass system, and the parameters of the simplified model are calculated.An equivalent mass change The quantitative relationship between the resonant frequency and the anti-phase resonant frequency of the tuning fork proves that the simplified mechanical model can accurately reflect the mechanical properties of the quartz tuning fork used in the scanning probe microscope.