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本文阐述了漫反射系数和粗糙面薄膜的厚度，寻出了漫反射椭偏测量术的方程，实用中测量了湿敏元件的湿敏薄膜厚度。
In this paper, the diffuse reflection coefficient and the thickness of the rough surface film are described. The equations of the diffuse reflection ellipsometry are found. The thickness of the humidity sensitive film is measured in practice.