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文章提出了在覆盖层厚度测量中,霍尔集成电路是老式的电感厚度传感器的较理想的替代品。它的优点是容易制作,灵敏度高,性能稳定。
The article presents Hall ICs as an ideal replacement for older inductive thickness sensors in overlay thickness measurements. Its advantages are easy to make, high sensitivity, stable performance.