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利用光声显微成象技术,对光学不透明材料的表面或亚表面的微细结构进行成象检测和研究正引起越来越广泛的兴趣。这种新成象技术是将强度经过调制的激光束聚焦在材料的表面,样品将全部(或部分)吸收的光能转变为热能,周期性热流则产生声信号,携带着样品表面或亚表面结构的信息。当聚焦的光点在样品表面进行光栅式扫描时,产生的光声信号经处理后显示于萤光屏上,即得到样品显微结构的光声象。由于集成电路等半导体器件是多层结构,特别需要对其亚表面的特性进行非破坏性检测,
Using photoacoustic microscopy, imaging detection and research on the microstructure of the surface or subsurface of optically opaque materials is attracting more and more widespread interest. The new imaging technique focuses the intensity-modulated laser beam on the surface of the material. The sample converts all (or part of) the absorbed light energy into heat and the periodic heat flow produces an acoustic signal that carries the sample surface or subsurface Structure of the information. When the focused spot is rasterized on the sample surface, the generated photoacoustic signal is processed and displayed on the fluorescent screen to obtain a photoacoustic image of the microstructure of the sample. Since semiconductor devices such as integrated circuits are multilayered structures, it is particularly necessary to perform non-destructive testing on the characteristics of their sub-surfaces,