日本大阪大学的西原浩教授与横河电机公司联合开发出小型、高性能且全集成在一张芯片上的光探测器。在一张基板上集成了光源、光接收元件、波导、发挥透镜和反射镜作用的衍射光栅,作为利用光干涉现象的探测器,用一张芯片实现所有的功能为世界首创。该探测器可用于试制评价位置、位移传感器和光盘用拾音器,现已确定其功能。不过,由于对温度变化非常敏感,故要达到实用 Hiroshi Nishihara, professor at Osaka University in Japan, and Yokogawa Electric Corporation jointly developed a small, high-performance and fully integrated on-chip photodetector. A light source, a light receiving element, a waveguide, and a diffraction grating functioning as a lens and a mirror are integrated on a single substrate. As a detector using the light interference phenomenon, all functions are realized by a single chip and become the world’s first. The detector can be used for trial evaluation positions, displacement sensors and optical pickups, and its function has now been confirmed. However, it is practical because of its sensitivity to temperature changes