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用光刻法加工电真空零件,在60年代就有开展,近几年来在制造微波管、毫米波管、光电二极管、直线加速器、显示器件等等中的阳极、栅极、栅极加强筋、电极片等等有较大的开展,能够加工钨、钼、镍、铜、钛、不锈钢等多种金属材料,加工厚度可从0.03～0.8毫米,面积可从几个平方毫米到500毫米×700毫米,加工精度最高可达0.01毫米。在这些零件的制造中不可缺少的原材料要用抗蚀剂(感光胶)。它的作用是保护零件图形部份不受
The use of photolithographic processing of vacuum components has been carried out in the 1960s, in recent years in the manufacture of microwave tubes, millimeter-wave tubes, photodiodes, linear accelerators, display devices and the like in anodes, grids, grid stiffeners, Electrode plates and so on a larger development, capable of processing tungsten, molybdenum, nickel, copper, titanium, stainless steel and other metal materials, processing thickness from 0.03 to 0.8 mm, the area can be from a few square mm to 500 mm × 700 Mm, processing accuracy up to 0.01 mm. In the manufacture of these parts indispensable to the use of raw materials resist (photosensitive adhesive). Its role is to protect part of the graphic part is not affected