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我们对一些在实际工作中遇到的二元合金如BeCu、TiMo、NiAl 和 Ni_3AI,三元合金6A14V-Ti和1Cr18Ni9Ti在进行AES定量分析过程中采用了两种基体效应修正方法:第一原理(first principles)的K因子法和a因子迭代法,同时考虑到择优溅射效应的修正。结果表明:用K因子基体效应的修正法和p.S.Ho的择优溅射效应修正对二元合金定量分析的平均相对偏差为2.9％,用a因子迭代法基体修正法与P.S.Ho择优溅射效应修正对三元和多元合金定量分析的平均相对偏差为9.5％。
We used two matrix effect correction methods for some of the binary alloys such as BeCu, TiMo, NiAl and Ni_3AI encountered in practical work, ternary alloy 6A14V-Ti and 1Cr18Ni9Ti for AES quantitative analysis: Principle 1 ( first principles K factor method and a factor iteration method, taking into account the correction of the preferential sputtering effect. The results show that the average relative deviation of the quantitative analysis of binary alloys is 2.9% with the correction method of K factor matrix effect and the optimal sputtering effect of pSHo, and the correction of a factor iteration method and PSHo preferential sputtering effect are used The average relative deviation of the quantitative analysis of ternary and multi-element alloys was 9.5%.