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从理论上研究了n型分布布拉格反射镜(n-DBR)的反射率对器件阈值电流、输出功率以及转换效率的影响,得出了最佳反射率。在此基础上研制了垂直腔面反射激光器(VCSEL)单管和阵列器件,采用波形分析法对VCSEL器件的功率进行了测试。在脉冲宽度60ns,重复频率100Hz条件下,500μm口径单管器件在注入电流为110A时,峰值输出功率达102W,功率密度为52kW/cm2,4×4、5×5阵列器件在100A时,功率分别达到98W和103W。对比了单管器件在连续、准连续和脉冲工作条件下的输出特性和光谱特性,连续和准连续条件下激射波长的红移速率分别为0.92nm/A和0.3nm/A,6A时的内部温升分别为85℃和18℃,而脉冲条件下激射波长的红移速率仅为0.0167nm/A,6A时的温升为1.5℃,远小于连续和准连续的情况,这也是器件在脉冲条件下能得到很高输出功率的主要原因。
The effect of the n-DBR reflectivity on the threshold current, output power and conversion efficiency of the device is studied theoretically, and the best reflectivity is obtained. On this basis, a vertical tube surface reflection laser (VCSEL) single-tube and array device was developed. The power of the VCSEL device was tested by waveform analysis. When the pulse width is 60ns and the repetition frequency is 100Hz, the peak output power of the 500μm single-mode device is 110W, the peak output power is 102W, the power density is 52kW / cm2, the power of 4 × 4, 5 × 5 array device is 100A Respectively, up to 98W and 103W. The output characteristics and spectral characteristics of single-tube devices under continuous, quasi-continuous and pulsed operation conditions were compared. The red-shift rates of laser wavelength under continuous and quasi-continuous conditions were 0.92nm / A and 0.3nm / A, respectively The internal temperature rise was 85 ℃ and 18 ℃, respectively, while the red shift rate of the laser pulse under the pulse condition was only 0.0167nm / A, and the temperature rise was 1.5 ℃ at 6A, which was much lower than the continuous and quasi-continuous condition. The main reason for high output power under pulsed conditions.