采用软成型和图案转移技术,制备了可用于高速芯片间光互连的大尺寸聚硅氧烷脊型光波导,光波导长度达23 cm。利用有效折射率法,对芯层残留层和传输模场的关系进行了分析。采用截断和数字化散射两种方法,测得输入光波长为633 nm时的平均传输损耗小于0.14 dB/cm。研究结果表明,波导的长度和损耗指标满足高速芯片间光互连的要求。 A large-size polysiloxane ridge optical waveguide that can be used for high-speed inter-chip optical interconnection was fabricated by soft-forming and pattern transfer technology with an optical waveguide length of 23 cm. Using the effective refractive index method, the relationship between the core layer and the transfer mode field is analyzed. Using truncation and digital scattering two methods, the average transmission loss measured when the input light wavelength is 633 nm is less than 0.14 dB / cm. The results show that the waveguide length and loss index meet the requirements of high speed inter-chip optical interconnection.