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以Sn(OH) 4 水合胶体为原料 ,采用简单的旋转涂覆与烧结工艺在Si片上成功制备出了表面形貌平整、光亮的SnO2 纳米晶薄膜 ,为该种材料制作实用的气敏元件打下了很好的基础。
Using Sn (OH) 4 hydrated colloid as raw material, a thin and smooth SnO2 nanocrystalline thin film with surface morphology was successfully prepared on Si by a simple spin-coating and sintering process, and a practical gas sensing element was fabricated for the material A good foundation.