“天光一号”KrF准分子激光系统采用无阶梯诱导空间非相干(EFISI)光束平滑技术,对光束进行平滑处理,改善光束焦斑的均匀性,实现靶位焦斑的均匀辐照,为状态方程的测量提供良好的实验基础。实验采用荧光法测量像位焦斑,利用荧光片等特殊材料将紫外光转化为可见光进行测量。在较高的能量密度范围内,紫外激光照射荧光体材料诱发的荧光与辐照激光的强度存在线性关系,因此 “Kriging ” KrF excimer laser system steplessly induced spatial non-coherent (EFISI) beam smoothing technology, smoothing the beam to improve the uniformity of the beam spot, to achieve uniform irradiation of the target spot focal spot, The equation of state measurement provides a good experimental basis. Experiments using fluorescence method to measure the image focal spot, the use of fluorescent materials and other special materials to convert ultraviolet light into visible light for measurement. At higher energy densities, there is a linear relationship between the intensity of the fluorescence induced by the UV laser-irradiated phosphor material and the intensity of the irradiated laser light