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本文对电子显微镜定量体视技术数据测试中产生误差的原因作了分析,并且提出了扫描电子显微镜正投影近似假设成立的条件,得到了该条件下的最小极限放大倍数:M_0=L/2Rα,进而求出了光学放大倍数N的限制条件:N<2RαM/L。利用晶体标样与三组约束方程,可以较准确地定出倾斜轴方位与倾斜角度。正确使用最小长度单位及放大倍数,是减小作图法误差的重要途径。最后,指出了定量体视技术在透射电镜中运用时必须注意的问题。利用扫描电镜定量体视技术可以测量样品的有关尺寸,并且已经在金属学、地学及生物学的显微测定中得到了应用。本文就此测量法中产生测量误差的主要原因及消除途径作一探讨。
In this paper, we analyze the reason of the error in quantitative stereo vision test of electron microscope and put forward the condition that approximate assumption of orthogonal projection of scanning electron microscope is established. The minimum limit magnification under this condition is obtained: M_0 = L / 2Rα, Further, the limiting condition of the optical magnification N is obtained: N <2RαM / L. Using the crystal standard and the three sets of constraint equations, the azimuth and tilt angle of the tilt axis can be determined more accurately. Proper use of the minimum length unit and magnification, is an important way to reduce the error of the drawing method. Finally, the problems that must be paid attention to when quantitative stereoscopic technique is used in TEM are pointed out. The use of SEM to quantify the size of a sample can be used in microscopy, geoscience and biology microscopy. In this paper, the measurement error in the measurement of the main reasons and ways to make a discussion.