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驻留时间求解问题是离子束加工中的关键问题.通常,离子束加工过程可以描述为一个包含驻留时间的二维卷积方程,理论上通过反卷积即可以求解出驻留时间.然而,反卷积问题是一个病态问题,所以驻留时间一般较难很好地求解出.为了解决这个问题,介绍了一个离散的线性模型——CEH模型,分析了该模型的优点.提出应用截断奇异值分解法(TSVD)来求解CEH模型;深入分析了该方法的优点,并利用“L-曲线”分析了驻留误差和加工量之间的关系以及用“L-曲线”对CEH模型中去除点和驻留点的不同取法进行了评价.仿真结果表明,CEH模型和TS-VD方法对于求解光学镜面离子束加工中的驻留时间很有效.
The dwell time solving problem is a key issue in ion beam machining.In general, the ion beam machining process can be described as a two-dimensional convolution equation containing the dwell time, which can theoretically be solved by deconvolution. However, , The deconvolution problem is a pathological problem, so the dwell time is generally difficult to solve very well.In order to solve this problem, we introduce a discrete linear model - CEH model and analyze the advantages of this model. The TSH model was used to solve the CEH model. The advantages of this method were analyzed in depth. The relationship between the resident error and the processing volume was analyzed by “L-curve” The results show that the CEH model and the TS-VD method are very effective in solving the dwell time in optical mirror surface ion beam machining.