微机械的研究开发上海交通大学徐锡林近十年里，人们应用半导体集成电路工艺相继制作出了尺寸在微米量级的微型齿轮、弹簧、连杆等，尤其是在１９８７年，两位留学美国的中国青年学人，在美国加州大学伯克利分校首次研制成功了转子直径为１００微米的硅静电微电机，虽然只... Research and Development of Micro-Mechanics Xu Xilin, Shanghai Jiaotong University In the past decade, micro-gears, springs, connecting rods and the like on the order of micrometers have been successively manufactured by using semiconductor integrated circuit technology. Especially in 1987, Chinese young people, at the University of California, Berkeley, the first successful development of the rotor diameter of 100 microns silicon electrostatic micro-motor, although only ...