薄膜,是指通过物理或化学过程,以原子、分子或离子形式受控地凝结于某一基体材料上所形成的固体材料。处于薄膜形态的物质,与对应的体材料相比,具有其一系列独特性质。所以,在现代微电子学领域中,薄膜器件正在发挥着越来越大的作用。事实上,薄膜科学与器件技术已经成为现代科学技术中不可缺 A thin film refers to a solid material that is formed by physical or chemical processes and is controlled to condense on a matrix material in the form of atoms, molecules or ions. Substances in the form of thin films have a series of unique properties compared to their corresponding bulk materials. Therefore, in the field of modern microelectronics, thin film devices are playing an increasingly important role. In fact, thin film science and device technology have become indispensable in modern science and technology