利用多弧离子镀技术制备的ＴｉＮ等各种硬质膜已经广泛应用于各种工模具表面强化[1 ] 。硬质膜质量的提高主要依赖于多弧离子镀膜机的技术进步。这种技术进步的实质在于更好地消除靶材液滴飞溅 ,提高靶材蒸发粒子的离化率[2 ] ,扩大真空室内等离子体均匀区范围 ,实现大束流离子 The use of multi-arc ion plating technology prepared TiN and other hard films have been widely used in a variety of mold surface hardening [1]. The improvement of the quality of the hard film mainly depends on the technological progress of the multi-arc ion plating machine. The essence of this technological progress is to better eliminate the target droplet splashing, to improve the ionization rate of the target evaporation particles [2], to expand the uniform area of ​​the plasma chamber within the vacuum chamber to achieve large beam ions