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给出了针对超精表面纳米形貌检测需要而研制的一种实用型宽范围扫描隧道显微镜(STM),扫描范围为40×40×10μm~3,配有一个放大倍数可调的光学显微镜帮助选择视场,可测量较大尺寸试件。实验表明,该STM所测图像清晰、使用方便、结构简单,适于产品化。
A practical wide-range scanning tunneling microscope (STM) developed for the detection of ultrafine surface nano-topography is proposed. The scanning range is 40 × 40 × 10μm ~ 3 and is equipped with an optical microscope with adjustable magnification Select the field of view, can measure larger specimens. Experiments show that the STM image measured clear, easy to use, simple structure, suitable for product.