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提出了一种利用非线性最小二乘拟合法自校准测量偏振元件Mueller矩阵参数的新方法。通过测量放入待测样品前后输出偏振态的Stokes参数,建立起由测得的输出偏振态参数、系统未知参数与被测样品的Mueller矩阵之间的函数关系式,使用多参数的非线性最小二乘拟合求解得到待测样品的Mueller矩阵。建立了一套基于铁电液晶波片、旋转波片及偏振片的光谱型Mueller矩阵椭偏仪,并通过自编的Labview自动控制软件实现了智能化测量。误差分析和实际测量结果表明,在600～900nm波长范围内,Mueller矩阵元参数的测量精度在0.01以内,重复性精度达到0.005。该测量系统无需对系统进行复杂的定标,简化了测量过程,实现了Mueller矩阵元参数的自校准测量。
A new method for self-calibrating Mueller matrix parameters of polarizer is proposed by nonlinear least-squares fitting method. By measuring the Stokes parameter of the output polarization state before and after the sample to be measured, the functional relationship between the measured output polarization parameter, the system unknown parameter and the Mueller matrix of the tested sample is established. The nonlinearity of the multi-parameter is minimized Multiply fitting solution to obtain the Mueller matrix of the sample to be tested. A spectroscopic Mueller Matrix Ellipsometer based on ferroelectric liquid crystal wave plate, rotating wave plate and polarizer was established and the intelligent measurement was realized by self-made Labview automatic control software. Error analysis and actual measurement results show that the accuracy of Mueller matrix element parameters is within 0.01 and the repeatability is 0.005 within the wavelength range from 600 to 900 nm. The measurement system eliminates the need for complex calibration of the system, simplifies the measurement process and realizes the self-calibration measurement of the Mueller matrix element parameters.