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碳化钛复层具有高硬度,高耐磨性和低磨擦系数等特点,因此在制造超硬工具和在无法进行润滑的超高真空和高温下工作滚动轴承,以及要求具有高耐磨性的工件等方面有广泛作用。通过前一段工作,使在钢基体上进行碳化钛气相沉积的沉积温度降低至800—900℃。工艺特点是常压、低氢气流量并在炉中放入海绵钛,以强化工艺过程。同时,对基体进行予先化学热处理使碳化钛复层与基体间结合力提高30%,并可对已沉积后的工件进行淬火,回火以提高工件性能。现已将这一工艺成功地应用于制造瓷件修坯刀,加工铝合金和铜合金的机动丝锥,钻机的摩擦付等工件上,使这些工件的使用寿命大为提高。与此同时,本文拟应用化学热力学对化学气相沉积中某些反应进行讨论。
Titanium carbide coating with high hardness, high wear resistance and low coefficient of friction and other characteristics, so in the manufacture of super-hard tools and can not be lubricated ultra-high vacuum and high temperature work under the rolling bearings, and require high wear-resistant workpieces, etc. There is a wide range of roles. By the previous work, the deposition temperature for the vapor deposition of titanium carbide on the steel substrate was reduced to 800-900 ° C. Process characteristics are atmospheric pressure, low hydrogen flow and sponge titanium into the furnace to strengthen the process. At the same time, the substrate is subjected to chemical heat treatment in advance to increase the binding force between the titanium carbide composite layer and the substrate by 30%, and the deposited workpiece can be quenched and tempered to improve the performance of the workpiece. This process has been successfully applied to the manufacture of porcelain repair tool, machining aluminum alloy and copper alloy taps, friction and other work on the rig, so that the life of these parts greatly improved. At the same time, this paper intends to use chemical thermodynamics to discuss some reactions in chemical vapor deposition.