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采用阳极层流离子源与非平衡磁控溅射结合的沉积方法在H13钢基体表面沉积出类金刚石膜(DLC),并对H13钢经不同表面预处理对后沉积的DLC膜的摩擦学性能进行了对比研究。结果表明:DLC膜结构致密,且DLC膜与梯度过渡层及基体三者之间结合牢固;H13钢经离子氮化后,梯度过渡层与氮化层间结合紧密,提高了膜与基体的承载能力;在保持相同摩擦速率的条件下,摩擦系数随着载荷的增加先增大后减小;H13钢离子渗氮处理后沉积的DLC膜其摩擦系数远小于未采用离子渗氮处理沉积的DLC薄膜。
A DLC film was deposited on the surface of H13 steel substrate by the combination of anodic ion source and unbalanced magnetron sputtering. The tribological properties of DLC film deposited on H13 steel by different surface pretreatment Conducted a comparative study. The results show that the structure of DLC film is compact and the bonding between DLC film and gradient transition layer and matrix is firm. After ion nitriding of H13 steel, the bonding between gradient transition layer and nitride layer is close, which improves the bearing of film and matrix The friction coefficient increases first and then decreases with the increase of load under the condition of the same friction velocity. The friction coefficient of DLC film deposited on H13 steel after ion nitriding is much smaller than that of DLC film deposited without ion nitriding film.