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选用氩气、氩气加氢气、氩气加乙炔等气体作为介质,石墨作为靶材进行真空阴极弧离子镀来制备类金刚石碳膜。石墨电弧有其独特的电弧特性曲线,不同气体介质对碳弧特性的影响不同,磁场的大小对电弧的稳定性有很大作用,碳弧下基片偏流随电弧电压的增加而减小,试验得到表面光滑的类金刚石碳(DLC)膜,对膜的表面进行了SEM分析。
Select argon, argon hydrogen, argon and acetylene gas as a medium, graphite as a target for vacuum cathodic arc ion plating to prepare diamond-like carbon film. Graphite arc has its unique arc characteristic curve. Different gas media have different effects on carbon arc characteristics. The magnitude of the magnetic field has a great effect on arc stability. The bias current of carbon arc substrate decreases with the increase of arc voltage. A smooth diamond-like carbon (DLC) film was obtained and the surface of the film was analyzed by SEM.