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为提高金刚石膜的粘附力,采用直流等离子体喷射CVD法和等离子体喷涂材料法合成了含金刚石组份梯度中间层。合成这种组份梯度金刚石膜所用的设备包括直流等离子体喷射炬,水冷基板座和真空反应室。将氢和甲烷气体的等离子体流喷涂在水冷基板上,形成金刚石膜。中间层由送入合成金刚石的等离子体中的粉末状物质形成。用改变粉末传送速率的办法控制组份梯度。基板为W/Mo合金,粉末状物质为WC。借助扫描电镜(SEM)和x射线显微分析(XMA)等分析方法,观察金刚石和等离子体喷射物混合体的形成。由于难以有效地控制非常低的粉末传送速率,因而组份梯度不是均匀的。x射线衍射和拉曼光谱分析表明中间层不含石墨。含中间层的金刚石膜的粘附强度超过150kg/cm~2;而不含中间层的金刚石膜的粘附强度则低于10kg/cm~2。
In order to improve the adhesion of diamond films, a diamond-containing graded interlayer was synthesized by direct current plasma jet CVD and plasma spraying. Equipment for synthesizing this component gradient diamond film includes a DC plasma torch, a water-cooled substrate holder, and a vacuum reaction chamber. A plasma flow of hydrogen and methane gas is sprayed onto a water-cooled substrate to form a diamond film. The intermediate layer is formed from a powdery substance that is fed into the plasma of the synthetic diamond. The composition gradient is controlled by changing the powder delivery rate. The substrate is W / Mo alloy and the powdery material is WC. The formation of a mixture of diamond and plasma jet was observed by means of scanning electron microscopy (SEM) and x-ray microanalysis (XMA). The compositional gradient is not uniform due to the difficulty of effectively controlling very low powder transport rates. X-ray diffraction and Raman spectroscopy showed that the middle layer was free of graphite. The adhesion strength of the diamond film with the middle layer exceeds 150 kg / cm ~ 2; the adhesion strength of the diamond film without the middle layer is less than 10 kg / cm ~ 2.