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温度是影响微加速度计精度的一个相当重要的因素。该文首先分析了微加速度计闭环系统各部分的温度特性对系统的影响;接着,设计实验分别测试各个部分的温度特性,确定出敏感元件的温度特性是系统温漂的主要来源;最后,设计了敏感元件芯片自恒温系统,并进行温度补偿。该方案在增加少量加热功率的基础上大大提高了系统的温度特性。实验结果表明:温控后,在增加760 mW加热功率的情况下,能保证微加速度计零偏温漂和二次补偿后零偏稳定性,分别从2.061 mgn/℃和2.269 mgn提高到0.199 mgn/℃和0.129 mgn。
Temperature is a very important factor that affects the accuracy of a micro-accelerometer. The paper first analyzes the influence of the temperature characteristics of each part of the micro-accelerometer closed-loop system on the system. Next, the design experiment tests the temperature characteristics of each part separately to determine the temperature characteristics of the sensitive components as the main source of system temperature drift. Finally, Sensitive element chip from the constant temperature system, and temperature compensation. The scheme greatly increases the temperature characteristic of the system on the basis of adding a small amount of heating power. The experimental results show that after the temperature is controlled, with the increase of 760 mW heating power, the micro-accelerometer’s zero-partial-temperature drift and the post-compensation bias stability can be guaranteed from 2.061 mgn / ℃ and 2.269 mgn to 0.199 mgn / ° C and 0.129 mgn.