etchin相关论文
Bainite, which is formed in metals, alloys, or even non-metallic materials under certainconditions, is a kind of very i......
A planar InP-based Gunn diode with a notch doping structure is designed and fabricated for integration into millimeter-w......
In this paper,we present the design,fabrication,and measurement of an evanescently coupled waveguide photodetector opera......
Fabrication and characterization of ultra-low noise narrow and wide band Josephson parametric amplif
We have fabricated two types of lumped-element Josephson parameter amplifiers(JPAs) by using a multilayer microfabricati......
Controllable Synthesis of Well-aligned ZnO Nanorod Arrays on Varying Substrates via Rapid Electrodep
A facile and rapid electrodeposition route was developed to controllably synthesize well-aligned Zn O nanorod arrays on ......
Fabrication and measurement of optical characterization of one dimensional photonic crystal with def
Numerical calculations based on the transfer matrix method are carried out,and the results of band gap with resonance pe......
This paper reviews the original work of the authors published recently,describing the influence of B on the matrix of th......
Experimental investigation on the relevance of mechanical properties and porosity of sandstone after
Under the effect of chemical etching,the macroscopic mechanical properties,mesoscopic structure,mineral content,and poro......
We report on the fabrication of the 10-mm-long lithium niobate ridge waveguide and its supercontinuum generation at near......
A novel capacitive micro-accelerometer with grid strip capacitances and sensing gap alterable capaci
The comb capacitances fabricated by deep reactive ion etching(RIE) process have high aspect ratio which is usually small......
介绍了硅各向异性腐蚀的特点和采用的模型,分析影响硅各向异性腐蚀速率的因素,然后借助计算机MEMS CAD软件ACES和IMEE对硅在KOH溶......
在Si衬底上生长了GaN基LED外延材料，将其转移到新的硅基板上，制备了垂直结构蓝光LED芯片．本文研究了这种芯片在不同n层刻蚀深度情况下......
采用C12＋Ar作为刻蚀气体进行了单晶4H-SiC材料的感应耦合等离子体（ICP）刻蚀工艺研究，分析了气体流量、气体混合比、反应室压力、1CP功......
利用响应面分析方法优化了用于压力传感器硅敏感芯体的刻蚀操作条件。主要考虑了温度、KOH浓度和腐蚀时间三个操作参数,将它们的范......
Cu-Zn alloy (Brass) is widely used as an industrial material because of its excellent characteristics such as high corro......
