提出了以测度不变方程法（ＭＥＩ）结合有限差分法求有厚度多导体互连线分布电容矩阵的一种方法．给出获得测度不变方程的两种途径，即使用完全格林函数和全电荷格林函数对测度子（ｍｅｔｒｏｎ）积分．后一种方法可用于解决一大类实际问题，有一定的通用性 A method of finding the distributed capacitance matrix of multi-conductor interconnects with MEI and finite difference method is proposed. Two ways of obtaining a measure invariant equation are given, namely integrating the metronos with the full Green’s function and the all-electric Green’s function. The latter method can be used to solve a large number of practical problems, with some generality