The Diagnosis of NO/N2/O2/C2H4 mixtures in plasma-assisted catalytic systems by Laser-induced Fluore

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户:ZS54902
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A new instrument employing molecular beam techniques and laser induced fluorescence (LIF) for measuring the reactivity of gas phase radicals at the surface of a substrate has been designed.
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