用物理气相沉积技术(PVD)及化学气相沉积技术(CVD)制备的金属或金属化合物(如TiN、TiC等)薄膜,涂复在机械零件及刀、磨具的表面上,获得了日益广泛的应用。而薄膜的机械强度,是评价薄膜性能优劣的一个重要指标,本文试就薄膜抗拉强度和耐压强度的几种测试方法进行了归纳和论述,并对这些方法的适用范围及局限性进行了比较。 Thin films of metal or metal compounds (such as TiN, TiC, etc.) prepared by physical vapor deposition (PVD) and chemical vapor deposition (CVD) are coated on the surfaces of mechanical parts and knives and abrasives to obtain an increasingly wide range of application. The mechanical strength of the film is an important indicator to evaluate the performance of the film. In this paper, several test methods of film tensile strength and compressive strength are summarized and discussed, and the scope and limitations of these methods are applied A