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提出了一种适用于光电子集成ＣＭＯＳ－ＳＥＥＤ灵巧像素光互连网络的二维光纤束列阵结构和制作方法， 采用精密加工的光纤列阵定位槽和光学监控系统， 成功地研制出３２×２ 的单模和多模光纤列阵Ｉ／Ｏ接口器件， 光纤列阵层内及层间位移误差均小于２μｍ ， 角向差小于０．０２°。实验中， 已将二维光纤列阵Ｉ／Ｏ接口器件用于１６×１６ ＣＭＯＳ－ＳＥＥＤ灵巧像素光电子集成Ｃｒｏｓｓｂａｒ光互连模块中， 实验结果表明， 该光纤束列阵Ｉ／Ｏ接口器件完全满足光互连系统的高精度要求。
A two-dimensional fiber array array structure and a fabrication method suitable for the optoelectronic integrated CMOS-SEED smart pixel optical interconnection network are proposed. A precision machined optical fiber array positioning slot and an optical monitoring system are successfully developed to produce 32 × 2 Single-mode and multimode fiber array I / O interface devices, the displacement errors within the fiber array layer and between layers are all less than 2μm, and the angular difference is less than 0.02 °. In the experiment, a two-dimensional array fiber array I / O interface device has been used in a 16 × 16 CMOS-SEED smart pixel optoelectronic integrated crossbar optical interconnection module. Experimental results show that the optical fiber array array I / O interface device completely satisfies Optical interconnect systems require high accuracy.