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文章研究了如何兼顾质子注入型垂直腔面发射激光器的功率和阈值性能.从模拟和实验两方面分析了质子注入能量与器件功率和阈值特性的关系.发现注入能量过高时,损伤有源区,降低了功率性能.而能量过低则会减弱对注入电流的限制,增加阈值.计算和实验结果表明,对于文中的器件结构,315 keV的注入能量是合适的.在10μm的注入孔径下获得器件的阈值为4.3 mA,功率为1.7 mW.
This paper studies how to balance the power and threshold performance of proton injection type vertical cavity surface emitting lasers.The relationship between proton injection energy and device power and threshold characteristics is analyzed both in simulation and experiment.It is found that when the injection energy is too high, , Lower the power performance, while lower energy will reduce the injection current limit and increase the threshold value.The calculation and experimental results show that 315 keV injection energy is suitable for the device structure in the text.It is obtained under the 10μm injection aperture The device has a threshold of 4.3 mA and a power of 1.7 mW.