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针对目前我国工业过程自动控制、机电一体化及其他应用领域微压测量用工业变送器、液位计技术的需要，采用较大半径／厚度比（ｒ／ｈ）的新型超薄微压陶瓷弹性体设计和高性能钌酸盐厚膜应变电阻，并运用厚膜印刷、烧结工艺技术，研制出工作温度高、耐腐蚀、性能价格比高的新型厚膜微压力传感器。量程１ｋＰａ、５ｋＰａ、１０ｋＰａ，精度０２％～０５％。并已在石化、冶金、电力等部门推广应用。主要阐述其设计、工艺及主要性能，并对研制中的若干问题进行探讨。
Aiming at the need of industrial transmitters and liquid level meters for micro-pressure measurement in industrial automation, mechatronics and other applications in our country, a new type of ultra-thin micro-pressure ceramic with larger radius / thickness ratio (r / h) Elastomer design and high-performance ruthenate thick film strain resistance, and the use of thick-film printing, sintering technology, developed a high temperature, corrosion resistance, high cost performance of the new thick film micro-pressure sensor. Range 1kPa, 5kPa, 10kPa, accuracy 0 2% ~ 0 5%. And has been in petrochemical, metallurgy, electric power and other departments to promote the application. Mainly describes its design, process and main performance, and discusses some problems in the development.