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用能量色散微束X射线荧光分析仪实际测量了微束准直器孔径和X射线强度对微束空间分辨率的影响,在准直器孔径为0.1mm条件下,获得以FWHM定义的空间分辨率最好为0.073mm。通过微束扫描测量出某硫化锰矿微区内的Mn、Fe、Zn、Pb的三维等高线荧光强度分布图和不同小区域内的能谱。
The effect of micro-beam collimator aperture and X-ray intensity on the spatial resolution of the micro-beam was measured by energy-dispersive microbeam X-ray fluorescence analyzer. With the collimator aperture of 0.1mm, the spatial resolution defined by FWHM The best rate is 0.073mm. The three-dimensional fluorescence intensity distribution of Mn, Fe, Zn and Pb in a certain manganese sulfide mineralization area was measured by means of beam scanning and the energy spectra in different small areas were measured.