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一.引言 硅恒流管由于恒流范围大,输出电导低,无需偏置电源和使用方便等优点,广泛用于交直流放大器、稳压源、锯齿波发生器、脉冲宽度调制器、射极跟随器等等电子线路中。随着仪器仪表、自动控制、载波通讯、航天卫星等方面恒流管使用的范围日益增大,对恒流管的性能要求也不断地提高而苛刻。用户要求恒流管动态电阻r_d与击穿电压V_B尽可能大些,夹断时外加电压V_P与温度系数α_1(指绝对值)尽可能小些。由于半导体器件制造的国产化设备、工艺条件与检测手段、外延材料质量等与国外的先进水平有着一定距离,国内工业化批量生产的恒流管在上述四个参数要求方面与国外同类产品存在一定的差距(见表1)。
I. Introduction Silicon constant current control due to a large range, low output conductance, no bias power supply and easy to use, etc., are widely used in AC and DC amplifiers, voltage regulator, sawtooth generator, pulse width modulator, emitter Follower and so on in the electronic circuit. With the instrumentation, automatic control, carrier communications, space satellites and other aspects of the use of constant current control is increasing, the performance requirements of the constant current pipe also continue to improve and harsh. User requirements constant current control resistor r_d and breakdown voltage V_B as large as possible, pinch applied voltage V_P and temperature coefficient α_1 (refer to the absolute value) as small as possible. Due to the localization of semiconductor devices manufacturing equipment, process conditions and testing methods, the quality of epitaxial materials and foreign advanced level has a certain distance, the domestic industrial mass production of constant flow tube in the above four parameters of similar products with foreign countries there is a certain Gaps (see table 1).